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1. [Re] [AMPS] 8877 (score: 1)
Author: park@surface.kriss.re.kr (Y. Park ¹Ú¿ë¼·)
Date: Thu, 4 Feb 1999 18:54:37 +0900 (KST)
RF plasma generation. It is widely used for thin film coating and semiconductor processing. There are lots of industrial RF generators/amplifiers for this purpose, usually at a fixed frequency. -- &
/archives//html/Amps/1999-02/msg00123.html (7,321 bytes)


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